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Currently the Calculators On-Line Center contains
over "23,785" Calculators & Spreadsheets,
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Semiconductors, MEMS, Microfabrication
Micromachining, Microengineering, etc.

Semiconductor Databases

Solid State Chemistry & Physics
Courses, Lectures, Textbooks, etc.

Semiconductor Courses, Lectures, Textbooks, etc.

Fabrication of Integrated Circuits
Courses, Lectures, Textbooks, etc.

Multi-Million-Gate CMOS VLSI Chip Design
Courses, Lectures, Textbooks, etc.

VLSI Design Courses, Lectures, Textbooks, etc.

Semiconductor Calculators, Animations, Simulations, etc.

Computer Chip Thermochemistry
Lessons, Animations, Simulations, etc.

Leica Vectorbean ~ Lithography

Microfabrication Courses, Lectures, etc.

MEMS Thermal Resistance, Heat Conduction, Heat Transfer

Microelectromechanical & Microelectronics
Courses, Lectures, Textbooks, etc.

Micromachining & Microengineering
Courses, Lectures, Textbooks, etc.

Nanotechnology

Electrical & Computer Engineering Center

Engineering Center

Calculators On-Line Center

Semiconductors, MEMS, Microfabrication, etc.

SEMICONDUCTOR DATABASES

DATABASE OF THE THERMOPHYSICAL PROPERTIES OF GASES USED IN THE SEMICONDUCTOR INDUSTRY - Fluid Metrology Group, Process Measurements Division, Chemical Science & Technology Laboratory, National Institute of Standards and Technology (NIST) Multimedia Thermophysical Properties for Semiconductor Process Gases Database (Text & Images). VERY VERY EXTENSIVE. For more information see Database of the Thermophysical Properties Home Page; Fluid Metrology Group; Process Measurements Division; Chemical Science & Technology Laboratory; NIST Online Databases or the National Institute of Standards and Technology (NIST)

SEMICONDUCTOR MATERIAL - HIGH PURITY AND ULTRA HIGH PURITY - POWDER, CHUNK, LUMP - American Elements Multimedia Semiconductor Material, High Purity and Ultra High Purity Power, Chunk, Lump Technical Publications (Text & Images). VERY VERY VERY...EXTENSIVE.
"...Specializing in High Purity Semiconductors, materials essential to computing, lighting, solar energy and telecommunications..."
For more information see American Elements

SOLID STATE CHEMISTRY COURSES, LECTURES, TEXTBOOKS, ETC.

SOLID STATE PHYSICS COURSES, LECTURES, TEXTBOOKS, ETC.

INTRODUCTION TO SOLID STATE CHEMISTRY (REAL PLAYER) - D.R. Sadoway, Department of Materials Science and Engineering, MIT Multimedia Solid State Chemistry Course (Text, Images, Videos/Movies & Audio/Sound) VERY VERY VERY....EXTENSIVE.
Examples of "Solid State Chemistry" Course Lectures include
"...Rutherford model of the atom, Bohr model of hydrogen Video Lecture;
Atomic spectra of hydrogen, matter/energy interactions involving atomic hydrogen Video Lecture;
De Broglie, Heisenberg, and Schrödinger. The Aufbau Principle,
Pauli Exclusion Principle, and Hund's Rules. Photoelectron Spectroscopy. Average Valence Electron Energy Video Lecture;
Born- Haber cycle. Octet stability by electron sharing: covalent bonding Video Lecture;
LCAO MO, Energy Level Diagrams for H 2 , He 2 , Li 2 . Hybridization,
double bonds and triple bonds, paramagnetism and diamagetism Video Lecture;
Characterization of atomic structure: the generation of x-rays and Moseley's Law Video Lecture;
Amorphous solids, glass formation, inorganic glasses Video Lecture: silicates; etc..."
For more information see Introduction to Solid State Chemistry Home Page; Donald R. Sadoway's Home Page or the Department of Materials Science and Engineering

SEMICONDUCTOR COURSES, LECTURES, TEXTBOOKS, ETC.

PRINCIPLES OF SEMICONDUCTOR DEVICES (ECEN 3320) - B. Van Zeghbroec, Solid State Materials and Devices, Department of Electrical & Computer Engineering, College of Engineering, University of Colorado at Boulder Multimedia Semiconductor Devices Course (Text, Images, & Simulations). VERY VERY VERY...EXTENSIVE.
Examples of "Principles of Semiconductor Devices" Course Chapters & Subchapters include
Semiconductor Fundamentals
"...Crystals and crystal structures;
Energy bands;
Density of states;
Carrier distribution functions;
Semiconductor thermodynamics; etc..."
Metal-Semiconductor Junctions
"...Structure and principle of operation;
Electrostatic analysis;
Schottky diode current;
Metal-Semiconductor contacts; etc..."
p-n Junctions
"...Structure and principle of operation;
Electrostatic analysis of a p-n diode;
The p-n diode current;
Laser diodes; etc..."
Biopolar Junction Transitors
"...Ideal transistor model;
Non-ideal effects;
Base and Collector transit time effects; etc..."
Metal-Oxide-Silicon Capacitors
"...Structure and principle of operation;
MOS analysis;
MOS capacitor technology;
p-MOS equations; etc..."
MOS Field Effect Transistors
"...MOSFET analysis;
MOSFET Circuits and Technology;
Advanced MOSFET issues; etc..."

For more information see Bart Van Zeghbroec's Home Page or the Department of Electrical & Computer Engineering

SEMICONDUCTORS I - Helmut Föll, General Materials Science, Technische Fakultät, Universität Kiel, Kiel, Germany Multimedia Semiconductor Course (Text, Images, Applets, Animations & Simulations). VERY VERY VERY...EXTENSIVE.
Examples of "Semiconductor" Course Chapters & Subchapters include
Semiconductor Physics
"...Basic Band Theory;
Basic Semiconductor Physics;
Elements of Advanced Theory..."
Silcon: General Properties & Technologies
"...Silicon Production;
Materials and Processes for Silicon Technology;
General Device and Product Considerations; etc..."
Silcon: Special Properties & Emerging Technologies
"...Silicon on Insulator;
Etching of Silicon; etc..."
Fundamentals of Optoelectronics
"...Materials and Radiant Recombination;
Light and Semiconductors;
Heterojunctions; etc..."
Principles of the Semiconductor Laser;
Light Emitting Devices;
Speed; etc..."
For more information see AMAT - General Materials Science

FABRICATION OF INTEGRATED CIRCUITS COURSES, LECTURES, TEXTBOOKS, ETC.

THEORY AND FABRICATION OF INTEGRATED CIRCUITS: RECIPES (ECE 344) - Department of Electrical and Computer Engineering, University of Illinois Multimedia Fabrication of Integrated Circuits Laboratory Course (Text & Images). VERY VERY VERY...EXTENSIVE.
Fabrication of Integrated Circuits: Recipes
"...uses a recipe which will give working electronic devices if followed correctly..."
Examples of "IC Process Recipes" include
"...RCA clean;
Initial oxidation;
Mask 1;
Mask 1 etch;
Mask 1 PR removal;
Boron predep;
BSG etch;
Mask 2;
Mask 2 etch;
Mask 2 PR removal;
Phosphorus predep;
PSG Etch;
Mask 3;
Mask 3 etch; etc..."
For more information see Theory and Fabrication of Integrated Circuits Home Page or the Department of Electrical and Computer Engineering

THEORY AND FABRICATION OF INTEGRATED CIRCUITS: GRAPHS & TABLES (ECE 344) - Department of Electrical and Computer Engineering, University of Illinois Multimedia Fabrication of Integrated Circuits Laboratory Course (Text, Images & Animations). VERY VERY EXTENSIVE.
Examples of "Theory and Fabrication of Integrated Circuits: Graphs & Tables" Subject Categories include
"...Wet Oxidation;
Steam Oxidation;
Oxide Color Chart;
Si Diffusivity Data;
Ion Implant Ranges;
Herman Mask Set..."
For more information see Theory and Fabrication of Integrated Circuits Home Page or the Department of Electrical and Computer Engineering

MULTI-MILLION-GATE CMOS VLSI CHIPS DESIGN COURSES, LECTURES, TEXTBOOKS, ETC.

COMPLEX DIGITAL SYSTEMS: MULTI-MILLION-GATE HARDWARE DESIGNS - Arvind & J.Emer, MIT Computer Architecture Group, Computer Science and Artificial Intelligence Laboratory (CSAIL), MIT Multimedia Complex Digital Systems: Multi-Million-Gate Hardware Designs Course (Text & Images). VERY VERY VERY...EXTENSIVE.
Complex Digital Systems Course
"...A project-oriented course to teach new methodologies for designing multi-million-gate CMOS VLSI chips using high-level synthesis tools in conjunction with standard commercial EDA tools. The emphasis is on modular and robust designs; reusable modules; correctness by construction; architectural exploration; and meeting the area, timing, and power constraints within standard-cell frameworks..."
Examples of "Complex Digital Systems: Multi-Million-Gate Hardware Designs" Course Lectures include
"...Verilog 1 - Fundamentals;
Verilog 2 - Design Examples;
Bluespec-2: Combinational Circuits & Simple Synchronous Pipelines;
Bluespec-4: Modeling Processors;
Bluespec-6: Modular Refinement;
FPGAs; etc..."
For more information see the Complex Digital Systems Course Home Page; MIT Computer Architecture Group Home Page or the MIT Computer Science and Artificial Intelligence Laboratory (CSAIL)

VLSI DESIGN COURSES, LECTURES, TEXTBOOKS, ETC.

FUNDAMENTALS OF VLSI CHIP DESIGN - J.D. Bakos, Department of Computer Science and Engineering, College of Engineering and Computing, University of South Carolina Multimedia Fundamentals of VLSI Chip Design (Text & Images). VERY VERY EXTENSIVE.
Examples of "Fundamentals of VLSI Chip Design" Course Lectures include
"... Setting up the tools;
Schematic entry and simulation;
Layout, DRC, extraction, LVS, layout simulation;
Preparation of standard cell library;
Library characterization;
Using SignalStorm in distributed mode;
Behavioral design of 32-bit adder datapath;
Synthesis of 32-bit adder datapath; etc..."
For more information see Jason D. Bakos's Home Page or the Department of Computer Science and Engineering

VLSI DESIGN - S. Hessabi, Department of Computer Engineering, Sharif University of Technology Multimedia VLSI Design Course (Text & Images). VERY VERY VERY...EXTENSIVE.
Examples of "VLSI Design" Course Lectures include
"...Basic Fabrication Steps and Layout;
Transistor Characteristics;
Design Rules, Stick Diagram;
Combinational Logic;
Combinational Logic Gates, Static Complementary Gates;
Transfer Characteristics, Delay and Power, Driving Large Loads;
Wire Delay, Switch Logic;
Combinational Logic Networks;
Managing the Delay of Combinational Networks;
Interconnect Design (Cross talk, Power Optimization);
Sequential Circuits;
Clocking Disciplines;
Subsystems;
Shifters and Adders;
Memories and Datapath; etc..."
For more information see Shaahin Hessabi's Home Page

SEMICONDUCTOR CALCULATORS, APPLETS, ANIMATIONS & SIMULATIONS

SEMICONDUCTOR APPLET SERVICES (JAVA APPLETS) - C.R. Wie, Electrical Engineering Department, SUNY, Buffalo, NY VERY VERY VERY....EXTENSIVE.
Semiconductor Applet Categories include:
"...Crystal Structure; Energy Bands and Charge Carriers;
Charge Carriers and Fermi Level [Semiconductor Statistics];
PN Junction Diode at Equilibrium;
PN Junction Diode under Applied Bias Voltage;
PNP or NPN Bipolar Junction Transistor (BJT);
Device Fabrication;
Metal-Oxide-Semiconductor (MOS) FET;
MOS Capacitor;
Junction Field Effect Transistor (JFET);
Amplifier Circuits with BJT or MOSFET;
Digital Circuits; MOS Memories;
Consumer Products with Semiconductor and Optoelectronic Components;
Device Application of PN Junction;
Applets on Transistors;
Problems general to Semiconductor Devices; etc..."
For more information see the Electrical Engineering Department

VIRTUAL MOSFET - Semizone, Inc. VERY EXTENSIVE.
Virtual MOSFET models
"...the behavior of an NMOS or PMOS as the following device parameters are varied: Channel width; Channel length; Substrate doping concentration; Gate dielectric thickness; etc..."
For more information see Resources or Semizone

COMPUTER CHIP THERMOCHEMISTRY COURSES, LECTURES, ETC.

COMPUTER CHIP THERMOCHEMISTRY ANIMATIONS & SIMULATIONS

COMPUTER CHIP THERMOCHEMISTRY: HOW CAN WE CREATE AN INTEGRATED CIRCUIT FROM SAND? (QUICKTIME & JAVA APPLETS) - M.A. Teichert, A.M. Stacy, A.C. Rico, S.E. Kegley, J.G. Loeser, M. Molinaro, S.E. Walden. C. Estrada and T. Horie, S. Whitmore; Beloit College and the Regents of the University of California Multimedia Chemistry Video Laboratory Demonstrations & Experiments (Text, Images, Animations, Simulations & Videos/Movies). VERY VERY EXTENSIVE.
For more information see Wiley Chem Connections or Beloit College

Examples of "Computer Chip Thermochemistry" Video Demonstrations include

Exploration 1C: How are integrated circuits built - Using Photolithography Video Demonstration

Exploration 1C: How are integrated circuits built - Making a Capacitor Video Demonstration

Exploration 1C: How are integrated circuits built - Making a Transitor Video Demonstration

LEICA VECTORBEAM CALCULATORS, APPLETS, ANIMATIONS & SIMULATIONS

LEICA VECTORBEAM CALCULATOR FOR 18 BIT PB (LEICA 18 BIT PARAMETER CALCULATOR) & LEICA VECTORBEAM CALCULATOR FOR 16 BIT PB (LEICA 16 BIT PARAMETER CALCULATOR) - M. Rooks, Yorktown Building, Watson Research Center, IBM VERY VERY EXTENSIVE.
Leica 18 Bit Parameter Calculator INPUT Values include:
"...Voltage; Current; Resolution; Field; Area;
VRU; Number of Blocks & Shapes; Dose..."
Leica 16 Bit Parameter Calculator INPUT Values include:
"...Voltage; Current; Resolution; Field; Area;
VRU; Number of Blocks & Shapes; Dose..."
For more information see the Yorktown Building, Watson Research Center or the Watson Research Center

LITHOGRAPHY CALCULATORS, APPLETS, ANIMATIONS & SIMULATIONS

LITHOGRAPHY ANALYSIS USING VIRTUAL ACCESS (LAVA) - Department of Electrical Engineering and Computer Sciences, U.C. Berkeley VERY VERY VERY...EXTENSIVE.
LAVA
"...is a web technology that allows lithographers around the globe to access lithography simulators remotely through the Internet. Through LAVA, technologists can utilize the SPLAT, SAMPLE, TEMPEST, and SIMPL simulators, which have been developed at UC Berkeley for optical lithography simulation..."
For more information see Authors - Developers Home Page; LAVA Home Page or the Department of Electrical Engineering and Computer Sciences

MICROFABRICATION COURSES, LECTURES, TEXTBOOKS, ETC.

MICROFABRICATION (2008) - Ali Javey, Department Electrical Engineering & Computer Sciences, College of Engineering, University of California, Berkeley Multimedia Microfabrication Technology Course (Text & Images). VERY VERY VERY...EXTENSIVE.
Microfabrication Technology Course
"...teaches the fundamentals of integrated-circuit (IC) fabrication and surface-micromachining technology, giving the student a basic understanding of IC and micromachining processes and the effect of processing choices on device performance. Students learn to use process simulation tools and also fabricate and characterize devices in the laboratory. This lecture part will cover the processing techniques and design methodologies of microfabrication...."
Examples of "Microfabrication Technology" Course Lectures include
"...Lecture 2: Introduction to Materials;
Lecture 3, 4, 5 & 6: Lithography;
Lecture 7: Etching;
Lecture 8: Thermal Oxidation;
Lecture 11: Thin Film Deposition;
Lecture 13 & 14: Diffusion;
Lecture 16: CMP & Layout; etc..."
For more information see Microfabrication Technology Home Page; EECS Courses or the Department Electrical Engineering & Computer Sciences

MICROFABRICATION (2006) - Nathan Cheung, Department Electrical Engineering & Computer Sciences, College of Engineering, University of California, Berkeley Multimedia Microfabrication Technology Course (Text & Images). VERY VERY VERY...EXTENSIVE.
Microfabrication Technology Course
"...Microfabrication Principles for IC and MEMS & Hands-on Fabrication and Testing of IC and MEMS Devices..."
Examples of "Microfabrication Technology" Course Lectures include
"...Lecture 3: Electrical Resistance;
Lecture 7: Ion Implantation;
Lecture 11: Photolithography;
Lecture 15: Etching;
Lecture 19: Layout Design Rules;
Lecture 24: Micro-Electro-Mechanical Systems (MEMS) Fabrication; etc..."
For more information see Microfabrication Technology Home Page; EECS Courses or the Department Electrical Engineering & Computer Sciences

MICROFABRICATION - Integrated Microfabrication Lab (IML), Department of Electrical & Computer Engineering, Brigham Young University Multimedia Microfabrication Course, Microfabrication Calculators, Microfabrication Databases, Microfabrication Lessons (Text & Images). VERY VERY VERY...EXTENSIVE.
Examples of "Microfabrication" Course Subject Categories include
"...Semiconductor Properties;
Microfabrication Processes;
Optical References;
Metrology;
Cleanroom Equipment;
Safety and Protocol; etc..."
For more information see the Department of Electrical & Computer Engineering

Examples of Microfabrication Databases, Calculators, etc. include

Semiconductor Properties

Energy Gap in III-V Ternary Semiconductors Calculator

Crystal Planes in Semiconductors: Crystal Plane Intersection Angle Calculator

Resistivity & Mobility Calculator/Graph for Various Doping Concentrations in Silicon

Metal-Semiconductor Ohmic and Schottky Contacts: Metal-Semiconductor Barrier Height Calculator & Metal-Semiconductor Junction Depletion Layer Width Calculator

Everything Wafers: A guide to semiconductor substrates

Microfabrication Processes

Chemical Etching - Metals and Semiconductors

Physical Vapor Deposition (PVD) - Metal deposition

Optical

ARROW Waveguide Layer Thickness Calculator

Power Reflection For A Single AR Coating Calculator

Optical Fiber Calculations

Silicon Dioxide/Nitride Color vs. Film Thickness and Viewing Angle Calculator

Metrology

Ellipsometer

Profilometer

Optical Fiber Calculations

Silicon Dioxide/Nitride Color vs. Film Thickness and Viewing Angle Calculator

MEMS HEAT TRANSFER, HEAT CONDUCTION, THERMAL RESISTANCE

THERMAL RESISTANCE CALCULATORS, APPLETS, ANIMATIONS & SIMULATIONS

HEAT CONDUCTION CALCULATORS, APPLETS, ANIMATIONS & SIMULATIONS

HEAT TRANSFER CALCULATORS, APPLETS, ANIMATIONS & SIMULATIONS

HEAT TRANSFER MODELS - CALCULATORS - Microelectronics Heat Transfer Laboratory, Department of Mechanical Engineering, University of Waterloo, Waterloo, Ontario, Canada VERY VERY EXTENSIVE.
Some examples from over "7" Heat Transfer Calculators include
"...Circuit Boards: Effective Conductivity Model for Rectangular Heat Sources Calculator;
Fluid Properties: Thermal Fluid Properties Calculator;
Heat Sinks: Natural Convection for Rectangular Heat Sinks Calculator;
Special Functions Calculator
"...Calculates special mathematical functions, including Gaussian error and complementary error functions, gamma functions, and Bessel functions of integer or fractional order..."

For more information see the Microelectronics Heat Transfer Laboratory

SPREADSHEETS FOR HEAT TRANSFER (SPREADSHEETS OPEN ONLINE WITH EXCEL, iWORK-NUMBERS, IBM LOTUS SYMPHONY, NEOOFFICE, OPENOFFICE CALC, ETC.) - R.J. Ribando, Department of Mechanical and Aerospace Engineering, School of Engineering & Applied Science, University of Virginia VERY VERY VERY...EXTENSIVE.
Examples from over "20" Heat Transfer Spreadsheets include:
Two-Dimensional, Steady-State Conduction Calculator
"...evaluates the analytical solution for steady-state conduction in a unit square with one boundary held at a different temperature than the other three and..."
Planck's Law Calculator
"...computes and displays the spectral blackbody emissive power for a number of source temperatures..."
Radiation View Factors Calculators include:
"...Perpendicular Plates Calculator;
Coaxial Disks Calculator;
Coaxial Cylinders Calculator;
Parallel Rectangles Calculator..."
Solution of Blasius Equation Calculator
"...performs a numerical solution of the Blasius equation for flow in a laminar, self-similar, flat plate boundary layer. The Runge-Kutta integration scheme and shooting algorithm..."
Internal-Flow Convection Correlations Calculator
"...computes the Nusselt number for forced convection in a circular pipe as a function of the Reynolds (based on diameter) and Prandtl numbers..."
One-Dimensional Compressible Flows Calculator
"...includes worksheets for:
(1) Isentropic flow with area change,
(2) Normal shock functions,
(3) Flow with friction (Fanno Line), and
(4) Flow with heat addition (Rayleigh Line)..."

For more information see Heat Transfer Tools: Educational Software for Heat and Mass Transfer; Robert J. Ribando's Home Page; Department of Mechanical and Aerospace Engineering or the School of Engineering & Applied Science

THERMAL CALCULATORS (THERMAL RESISTANCE, HEAT CONDUCTION, FIN EFFICIENCY, ETC.) - Novel Concepts, Inc., Las Vegas, NV VERY VERY EXTENSIVE. For more information see Novel Concepts

Some examples from over "8" Thermal Calculators include

Cylinder Thermal Resistance Calculator
Cylinder Thermal Resistance Calculator INPUT Values include:
"...Radius; Height; Thermal Conductivity..."

Slab Mass Thermal Resistance Calculator
Slab Mass Thermal Resistance Calculator INPUT Values include:
"...Width; Length; Height; Density; Specific Heat..."

Pin Fin Efficiency Calculator
Pin Fin Efficiency Calculator INPUT Values include:
"...Radius; Height; Thermal Conductivity; Film Coefficient..."

UNSTEADY STATE HEAT CONDUCTION APPLETS & EXCEL SPREADSHEET CALCULATORS (SPREADSHEETS OPEN ONLINE WITH EXCEL, iWORK-NUMBERS, IBM LOTUS SYMPHONY, NEOOFFICE, OPENOFFICE CALC, ETC.) - Andrey Solomin, Katholieke Universiteit Leuven, Belgium VERY VERY EXTENSIVE. For more information see Fysische transportverschijnselen (1106) & Fysische transport verschijnselen (1125) or Course Web Pages

Some examples of Unsteady State Heat Conduction Calculators include

Transient Conduction in Semi-Infinite Solid
Transient Conduction in Semi-Infinite Solid Calculator INPUT Values include:
"...TF; TI; Conductivity; Density; Specific Heat;
Fluid Conversion Coefficient; Duration; Step Duration;
Maximum Coordinate; etc..."

Transient Conduction in an Infinite Plane Wall
Transient Conduction in an Infinite Plane Wall Calculator INPUT Values include:
"...TF; TI; Conductivity; Density; Specific Heat;
Fluid Conversion Coefficient; Duration; Step Duration;
Wall Width; etc..."

MICROELECTRONICS COURSES, LECTURES, TEXTBOOKS, DATABASES, ETC.

MICROELECTROMECHANICAL COURSES, LECTURES, TEXTBOOKS, DATABASES, ETC.

MEMS COURSES, LECTURES, TEXTBOOKS, DATABASES, ETC.

MICROELECTRONICS CALCULATORS, APPLETS, ANIMATIONS & SIMULATIONS

MEMS CALCULATORS, APPLETS, ANIMATIONS & SIMULATIONS

MEMS & NANOTECHNOLOGY DATABASES & CALCULATORS & APPLETS

FOR NANOTECHNOLOGY COURSES, DATABASES ETC. SEE ENGINEERING CENTER: NANAOTECHNOLOGY

MEMS and Nanotechnology Databases

MEMS AND NANOTECHNOLOGY EXCHANGE PROCESS CATALOG - MEMS and Nanotechnology Exchange, hosted by the Corporation for National Research Initiatives (CNRI) Multimedia MEMS and Nanotechnology Database (Text, Images & Process Characteristics Calculators). VERY VERY VERY...EXTENSIVE.
MEMS and Nanotechnology is
"...the most comprehensive and diverse set of implementation solutions for MEMS, micro- and nano-technologies to be found anywhere in the world..."
Examples of MEMS and Nanotechnology "Process Subject Categories with Matching Process Capabilities" include
"...Bonding;
Deposition;
Doping;
Etch;
LIGA;
Lift Off;
Lithography;
Mask Making;
Metrology;
Packaging;
Polishing;
Process Technologies;
Thermal; etc..."
For more information see MEMS and Nanotechnology Exchange or the Corporation for National Research Initiatives (CNRI)

MICROELECTROMECHANICAL SYSTEMS (MEMS) MATERIAL PROPERTIES DATABASE - MEMS and Nanotechnology Clearinghouse Multimedia MEMS Material Properties Database (Text & Images). VERY VERY EXTENSIVE.
Depending on Material the MEMS Material Properties Database includes:
"...Compressive strength; Density; Dielectric Constant, Relative;
Electrical Rresistivity; Hardness, Knoop (KH); Hardness, Vickers (VH);
Modulus of Rupture; Piezoelectric Constant; Poisson's Ratio;
Stiffness; Tensile Strength; Thermal Conductivity; etc..."
For more information see MEMS and Nanotechnology Clearinghouse

NANOMATERIALS DATABASE: ELECTRON-MOLECULE COLLISION CROSS-SECTIONS & THERMOCHEMICAL PROPERTIES - Center for Nanotechnology, AMES Laboratory, NASA Multimedia Nanomaterials Database (Text & Images). VERY VERY EXTENSIVE. For more information see Computational Nanotechnology; Nanotechnology or the Center for Nanotechnology

Microelectromechanical - MEMS Courses, Lectures, Textbooks, etc.

FUNDAMENTALS OF MICROELECTROMECHANICAL SYSTEMS (MEMS) - T. Cui, Department of Mechanical Engineering, Institute of Technology, University of Minnesota Multimedia Fundamentals of Microelectromechanical Systems Course (Text & Images). VERY VERY VERY...EXTENSIVE.
Examples of "Fundamentals of Microelectromechanical Systems" Course Lectures include
"...Introduction to MEMS;
Materials for MEMS;
Photolithography;
Surface Micromachining;
Dry Etching;
Wet Etching and Bulk Micromachining;
Oxidation and CVD;
Bonding, Packaging, and Integration;
Polymer Microfabrication;
Nontraditional Microfabrication Techniques;
Metrology and Mask Design;
Electrical and Magnetic Systems;
Microfluidic Systems;
Chemical Microsystems; etc..."
For more information see Tianhong Cui's Home Page or the Department of Mechanical Engineering

Microelectronics - MEMS Calculators, Applets, Simulations, etc.

MEMS/MICROELECTRONICS - UTD MEMS Research Group, Department of Electrical Engineering, University of Texas, Dallas, Texas VERY VERY VERY...EXTENSIVE. For more information see UTD MEMS Research Group, MiNDS (Micro/Nano Devices and Systems) Lab

Some examples from over "16" Microelectronics Calculators & Applets include

Mechanical Modeling: Cantilever Beam: Fixed at One End (Point Load)
Cantilever Beam: Fixed at One End (Point Load) Calculator INPUT Values include:
"...Load; Length; Width; Height; Young's Modulus..."

Mechanical Modeling: Doubly-clamped Beam: Fixed at Both Ends (Distributed Load)
Doubly-clamped Beam: Fixed at Both Ends (Distributed Load) Calculator INPUT Values include:
"...Load; Length; Width; Height; Young's Modulus..."

Fabrication Process (Single Crystal Silicon: Growth, Defects): Doping Concentration vs Position along the grown CZ Crystal for Common Dopants in Silicon
Doping Concentration vs Position along the grown CZ Crystal for Common Dopants in Silicon Calculator INPUT Values include:
Select "...Al; As; Bi; B; C; Ga; Li; O; P or Sb..."
Input Fraction "...0.1; 0.2; 0.3 to 1.0..."

Fabrication Process (Diffusion): Time Evolution of Erfc Diffusion Profile
Time Evolution of Erfc Diffusion Profile Applet "...demonstrate the evolution of an Erfc diffusion profile. When near a surface, the time evolution of the profile looks as same as..."

MEMS CALCULATOR (E-STANDARDS FOR MEMS) - Semiconductor Electronics Division (SED), Electronics and Electrical Engineering Laboratory (EEEL), National Institute of Standards & Technology (NIST) VERY VERY VERY...EXTENSIVE.
Examples from over "18" MEMS Calculators include
"...Young's Modulus Calculator (using SEMI standard MS4): Data Sheet YM.1 - Using single layered resonating cantilevers;
Residual Strain Calculator (using ASTM standard E 2245): Data Sheet RS.1 - Using fixed-fixed beam test structures;
Strain Gradient Calculator (using ASTM standard E 2246): Data Sheet SG.1 - Using cantilever test structures;
Step Height or Thickness Calculator (using SEMI standard MS2): Data Sheet SH.4 - Thicknesses of all the layers in a CMOS process using electro-physical technique;
In-plane Length or Deflection Calculator (using ASTM standard E 2244): Data Sheet L.3 - In-plane lengths with one end anchored;
Wafer Bond Strength Calculator (using SEMI standard MS5): Data Sheet WBS.1 - Using micro-chevron test structures; etc..."
For more information see the MicroNanoTechnology Project; MicroElectroMechanical Systems; Semiconductor Electronics Division (SED); Electronics and Electrical Engineering Laboratory (EEEL) or NIST

MICROMACHINING COURSES, LECTURES, TEXTBOOKS, ETC.

MICROENGINEERING COURSES, LECTURES, TEXTBOOKS, ETC.

Microengineering Courses, Textbooks, Technical Reports, etc.

INTRODUCTION TO MICROENGINEERING: MICROENGINEERING, MICROSYSTEMS, MICROSENSORS & MICROACTUATORS - Author: D. Banks, hosted by the Department of Electronic and Electrical Engineering, University of Surrey, U.K. Multimedia Microengineering, Microsystems, Microsensors & Microactuators Textbook (Text & Images). VERY VERY VERY...EXTENSIVE.
"...A basic introduction to microengineering, without getting too technical..."
Examples of "Introduction to Microengineering: Microengineering, Microsystems, Microsensors & Microactuators" Textbook Chapters include
"...Photolithography;
Silicon Micromachining;
Excimer Laser Micromachining;
LIGA; Mask Design;
Microsystems;
Microsystem Components;
Microsensors;
Microactuators; etc..."
For more information see Danny Banks Home Page

Microengineering, Submicrometer & Nanometer Technology Videos/Movies

MICROMACHINE (QUICKTIME & AVI) - Intelligent Micromachine Initiative, Microsystems Science, Technology, and Components (MSTC), Sandia National Laboratories Multimedia Micromachine Video Lessons (Text, Images & Videos/Movies). VERY VERY EXTENSIVE.
Examples of "Micromachine" Video Subject Categories include
"...Bugs on Devices;
Motors;
Dynamic SEMS;
Gear Chains;
Mirrors;
Linear Racks;
Gears & Transmissions;
Steam Engines;
Optical Encoders/Shutters; etc..."
For more information see MicroElectroMechanical Systems (MEMS)

Some examples from over "60" Videos/Movies include

Gear Chain Videos

Motor Videos

Dynamic SEMS Videos

MICROMACHINING (QUICKTIME) - C.F. Quate, The Quate Group, Department of Electrical Engineering, School of Engineering, Stanford University Multimedia Micromachining Lessons & Videos (Text, Images, Simulations, Videos/Movies & Audio/Sound). VERY VERY EXTENSIVE.
Examples of "Micromachining" Lessons include
"...Cantilevers;
Arrays;
NanoTubes;
Fabrication; etc..."
Examples of "Micromachining: Atomic Force Microscope" Video Lessons include
"...Fly-by Over 2mmX2mm AFM Image Video;
Increasing the Throughput of the Atomic Force Microscope Video;
High-Speed Atomic Force Microscopy Video;
Integrated Actuator (for force feedback) AFM Cantilever Demonstration Video; etc..."
For more information see Quate Group; Department of Electrical Engineering or the School of Engineering

SUBMICROMETER AND NANOMETER TECHNOLOGY VIDEOS (QUICKTIME) - George Barbastathis, Karl Berggren, Henry Smith, Department of Electrical Engineering & Computer Science, & the MIT OpenCourseWare, MIT Multimedia Submicrometer and Nanometer Technology Videos (Text, Images & Videos/Movies & Audio/Sound). VERY VERY VERY...EXTENSIVE.
Examples of "Submicrometer and Nanometer Technology" Video Lessons include
"...SEM Inspection Video;
SEM Sample Preparation Video;
SEM Sample Mounting Video;
Surface Profilometer Video;
Atomic Force Microscope Video; etc..."
For more information see Submicrometer and Nanometer Technology; Department of Electrical Engineering & Computer Science; Electrical Engineering and Computer Science Courses or the MIT OpenCourseWare

Electrical & Computer Engineering Center

Engineering Center

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